진종한 교수

Jonghan Jin

INFO

  • 소속캠퍼스한국표준과학연구원
  • 전공 측정과학
  • 직급전공책임교수
  • 연락처042-868-5867
  • 출신전공기계공학
  • 학위박사
  • 최종출신대학한국과학기술원
  • 이메일
개인홈페이지

연구분야

차세대 반도체/디스플레이 공정에서의 고속 삼차원 형상 측정

High-speed 3D Profile Measurement on Semiconductor and Display Manufacturing Process

대표연구실적

-  A Hybrid Non-destructive Measuring Method of Three-dimensional Profile of Through Silicon Vias for Realization of Smart Devices, Scientific Reports 2018 -  Dimensional metrology using the optical comb of a mode-locked laser, Measurement Science and Technology, 2016 (Cover and Review Paper) -  Thickness and refractive index measurement of a silicon wafer based on an optical comb, Optics Express, 2010

논문(최근 5년)

-  Vibration-insensitive measurements of the thickness profile of large glass panels[ OPTICS EXPRESS,2015-12-14] -  Dimensional metrology using the optical comb of a mode-locked laser[Measurement Science and Technology,2016-02-01] -  Absolute angle measurement using a phase-encoded binary graduated disk[Measurement,2016-02-15] -  공기압력모델에 기반한 혈류 시뮬레이터의 동적 특성 평가[한국정밀공학회지,2016-06-01] -  Measurement of refractive index dispersion of a fused silica plate using Fabry-Perot interference[ APPLIED OPTICS,2016-08-10] -  Optical Fiber-Based Confocal and Interferometric System for Measuring the Depth and Diameter of Through Silicon Vias[ JOURNAL OF LIGHTWAVE TECHNOLOGY,2016-12-01] -  Absolute distance measurement method without a non-measurable range and directional ambiguity based on the spectral-domain interferometer using the optical comb of the femtosecond pulse laser[ APPLIED PHYSICS LETTERS,2016-12-16] -  Construction of the prediction model between pressure and flow rate for pulsating flows based on the Greenfield-Fry model concerning wave dispersion[ EXPERIMENTS IN FLUIDS,2017-04-03] -  300 mm 실리콘 웨이퍼용 고속 관통전극 깊이 계측 장비 개발[한국정밀공학회지,2017-05-01] -  An interferometric system for measuring thickness of parallel glass plates without 2π ambiguity using phase analysis of quadrature Haidinger fringes[ REVIEW OF SCIENTIFIC INSTRUMENTS,2017-05-01] -  Total physical thickness measurement of a multi-layered wafer using a spectral-domain interferometer with an optical comb[ OPTICS EXPRESS,2017-05-29] -  Wavelength measurement by Fourier analysis of interference fringes through a plane parallel plate[APPLIED OPTICS,2017-12-05] -  Note: An absolute X-Y-Θ position sensor using a two-dimensional phase-encoded binary scale[REVIEW OF SCIENTIFIC INSTRUMENTS,2018-04-12] -  A Hybrid Non-destructive Measuring Method of Three-dimensional Profile of Through Silicon Vias for Realization of Smart Devices[SCIENTIFIC REPORTS,2018-10-26] -  Physical thickness and group refractive index measurement of individual layers for double-stacked microstructures using spectral-domain interferometry[OPTICS COMMUNICATIONS,2018-09-20] -  Interferometric profile scanning system for measuring large planar mirror surface based on single-interferogram analysis using Fourier transform method[MEASUREMENT,2018-03-01] -  A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry[INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,2019-03-11] -  High-resolution angle sensor using multiple peak positions of a double slit interference pattern[REVIEW OF SCIENTIFIC INSTRUMENTS,2019-04-04] -  Simultaneous measurement method of the physical thickness and group refractive index free from a non-measurable range[OPTICS EXPRESS,2019-08-19] -  Developement of Spectral-Domain Interferometer Having Dual Reference Paths based on Polarization for Measuring Absolute Distances[Journal of the Korean Society for Precision Engineering,2020-03-01] -  On-machine calibration of angular position and runout of a precision rotation stage using two absolute position sensors[MEASUREMENT,2020-03-01] -  Feasibilty Study on Dimensional Standard for Material Extrusion Type 3D Printed Structures[Journal of the Korean Society for Precision Engineering,2020-04-01] -  Precise thickness profile measurement insensitive to spatial and temporal temperature gradients on a large glass substrate[APPLIED OPTICS,2020-07-10] -  A novel method for simultaneous measurement of thickness, refractive index, bow, and warp of a large silicon wafer using a spectral-domain interferometer[METROLOGIA,2020-10-05]

특허(최근 5년)

-  대형 유리기판의 물리적 두께 프로파일 및 굴절률 분포 측정을 위한 광간섭계 시스템[2017-04-27] -  Absolute Position Measurement Method, Absolute Position Measurement Apparatus and Scale[2017-05-16] -  측정 불가 구간과 방향 모호성이 없는 절대거리 측정을 위한 분광형 간섭계 시스템[2017-10-26] -  Thickness Measuring Apparatus and Thickness Measuring Method[2018-03-20] -  THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD[2018-05-22] -  Method for measuring thickness[2018-06-01] -  반사면 프로파일 측정 방법 및 장치 [2019-04-09] -  광픽셀어레이를 이용한 박막과 후막의 두께 및 삼차원 표면 형상 측정 광학 장치[2019-06-03] -  투명 기판 모니터링 장치 및 투명기판 측정 방법[2017-03-01] -  공기 부상 박막 두께 측정 장치[2019-10-28] -  절대 위치 측정 방법, 절대 위치 측정 장치, 및 컬러 스케일[2019-11-01] -  측정 불가 영역을 극복한 두께 및 굴절률 측정 장치[2020-06-30] -  ABSOLUTE POSITION MEASURING METHOD, ABSOLUTE POSITION MEASURING APPARATUS, AND COLOUR SCALE[2020-10-13]