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Kang Sang-Woo(Professor)

INFO

  • AffiliationKorea Research Institute of Standards and Science
  • Majors Science of Measurement
  • Contact Information042-868-5823
  • Major화학공학
  • DegreePh.D.
  • Highest Level of Education포항공과대학교
  • E-Mail

Field of Research

Development of semiconductor process, device and diagnosis system

Research Results

-  상온 구리박막 증착 -  PCDS 개발 -  반도체용 소재 및 부품 평가기술 개발

Book(in last five years)

-  진공기술 핸드북[2014-10-31]

Treatise

-  Theoretical Analysis for Quantitative Evaluation of In-Situ Nanoparticle Measurement Probability[Journal of Nanoscience and Nanotechnology,2014-12-01] -  Modeling of silicon nanoparticle formation in inductively coupled plasma using a modified collision frequency function[Journal of Mechanical Science and Technology,2014-11-01] -  Simulation and analysis of grating-integrated quantum dot infrared detectors for spectral response control and performance enhancement[JOURNAL OF APPLIED PHYSICS,2014-04-22] -  Phase transition characteristics under vacuum of 910-di(2-naphthyl)anthracene for organic light-emitting diodes[JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2014-03-01] -  Plasma-enhanced atomic layer deposition of silicon dioxide films using plasma-activated triisopropylsilane as a precursor[Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films,2014-04-11] -  Incident angular dependence of surfaceplasmon polariton modes for thermal imaging[Electronics Letters,2014-11-20] -  Enhanced transmission due to antireflection coating layer at surface plasmon resonance wavelengths[ OPTICS EXPRESS,2014-11-25] -  Nanoscale Reaction Vessels: Highly Ordered Nanocrystal Arrays inside Porous Anodic Alumina Nanowells[ INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE,2015-08-01] -  Buckled Au@PVP Nanofiber Networks for Highly Transparent and Stretchable Conductors[ ADVANCED ELECTRONIC MATERIALS,2016-01-12] -  Surface plasmon resonant splitting andmerging due to infrared incidence throughthermal imaging lens[ ELECTRONICS LETTERS,2015-07-01] -  Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum[ REVIEW OF SCIENTIFIC INSTRUMENTS,2016-02-01] -  Low-temperature growth of layered molybdenum disulphide with controlled clusters[ SCIENTIFIC REPORTS,2016-02-23] -  Sensor based on chemical vapour deposition-grown molybdenum disulphide for gas sensing application[ RSC ADVANCES,2016-06-30] -  Selective Deposition of Cobalt Oxide Thin Films via H2O-Vapor-Catalyzed Reaction[ JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016-06-20] -  Strain-controlled boron and nitrogen doping of amorphous carbon layers for hard mask applications[ DIAMOND AND RELATED MATERIALS,2016-08-14] -  Improving precursor adsorption characteristics in ATR-FTIR spectroscopy with a ZrO2 nanoparticle coating[ JOURNAL OF NANOPARTICLE RESEARCH,2017-01-24] -  Hierarchical, Dual-Scale Structures of Atomically Thin MoS2 for Tunable Wetting[ NANO LETTERS,2017-02-06] -  Metalorganic chemical vapor deposition-regrown Ga-rich InGaP films on SiGe virtual substrates for Si-based III-V optoelecronic device applications[ JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2017-03-24] -  Numerical study on heat transfer and pressure drop in laminar-flow multistage mini-channel heat sink[ INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER,2017-01-09] -  Wafer-scale production of highly uniform two-dimensional MoS2 by metal-organic chemical vapor deposition[ NANOTECHNOLOGY,2017-04-07] -  The study in the precursor adsorpyion using in-situ nanoparticle-assisted attenuated total reflectance infrared spectroscopy[한국진공학회지,2015-07-29] -  Measurement of the Particle Current Changes Associated with the Flatness of Deflector Mesh Surface in Particle Beam Mass Spectrometer System[한국진공학회지,2016-03-31] -  Effects of temperature and pressure on sulfurization of molybdenum nano-sheets for MoS2 synthesis[ THIN SOLID FILMS,2016-12-21] -  Characterization of wafer-scale MoS2 and WSe2 2D films by spectroscopic ellipsometry [ CURRENT APPLIED PHYSICS,2017-07-05]

Patent

-  분리형 입자 집속 유닛을 가지는 입자복합특성 측정장치[2014-05-23] -  입자 분포 측정 및 교정용 모듈을 가지는 입자 복합특성 측정장치[2014-03-20] -  전구체 샘플링 장치, 및 이를 이용한 전구체 샘플 분석방법[2014-06-25] -  최적유량조절을 위한 입자 복합특성 측정장치 배기 시스템[2014-03-20] -  유량조절장치 및 이를 이용한 입자 복합특성 측정장치[2014-09-12] -  화학증착소재 실시간 진단장치[2015-01-08] -  푸리에 변환 적외선 분광 장치[2015-01-20] -  반도체 코팅설비의 오염 진단장치 및 진단방법 [2015-07-03] -  휴대용 열전 충전장치 및 그 제조방법[2015-08-06] -  무반사층이 결합된 플라즈마모닉 적외선 소자[2016-05-20] -  공기와 표면플라즈마 공명기 사이의 임피던스를 정합시키기 위하여 메타물질에 기반한 무반사코팅을 이용한 적외선 광 검출기[2016-05-20] -  열전박막의 수직방향 열전특성 측정센서유닛[2016-09-28] -  열전박막의 수평 및 수직방향 제백계수 측정 센서 유닛[2016-09-28] -  열전박막의 제백계수 측정장치[2016-10-25] -  스마트폰을 기반으로 하는 현장용 그래프 수치 분석 어플리케이션 및 그를 이용한 수치 분석방법[2017-02-27] -  공정가스 분석장치[2017-05-08] -  정전 편향계의 메쉬전극 구조[2017-07-04] -  다층 저항식 다점 온도측정웨이퍼 센서 및 그 제조방법[2017-06-07] -  금속 디스크 어레이를 구비한 적층형 태양전지[2017-09-26] -  다층 저항-열전식 온도측정 웨이퍼 센서 및 그 제조방법[2017-06-07] -  2차원 전이금속 칼코지나이드의 제조 방법[2017-08-16]